Fund shareholders of Amtech Systems Inc
ISIN US0323325045 · United States · LEI 5299008VRUUPETM6HZ85
- Fund shareholders
- 94
- Of which ETFs
- 15 79 other funds
- Value held
- 52.2M $
- Share of capital
- 15.5 % of 17.5M shares on Jul 31, 2026
| Fund | Shares | Value | Weight in fund | Share of capital | |
|---|---|---|---|---|---|
| First Eagle Small Cap Opportunity Fund First Eagle Funds | 734,102 | 11.3M $ | 0.39 % | 4.19 % | as of Jul 31, 2026 ↗ |
| VANGUARD TOTAL STOCK MARKET INDEX FUND VANGUARD INDEX FUNDS | 443,626 | 10.2M $ | 0.00 % | 2.53 % | as of Jun 30, 2026 ↗ |
| iShares Russell 2000 ETF iShares Trust | 300,844 | 6.9M $ | 0.01 % | 1.72 % | as of Jun 30, 2026 ↗ |
| Fidelity Small Cap Index Fund Fidelity Salem Street Trust | 128,384 | 2M $ | 0.01 % | 0.73 % | as of Jul 31, 2026 ↗ |
| VANGUARD EXTENDED MARKET INDEX FUND VANGUARD INDEX FUNDS | 124,071 | 2.9M $ | 0.00 % | 0.71 % | as of Jun 30, 2026 ↗ |
| iShares Russell 2000 Growth ETF iShares Trust | 109,995 | 2.5M $ | 0.02 % | 0.63 % | as of Jun 30, 2026 ↗ |
| U.S. Targeted Value Portfolio DFA INVESTMENT DIMENSIONS GROUP INC | 99,906 | 1.5M $ | 0.01 % | 0.57 % | as of Jul 31, 2026 ↗ |
| U.S. SMALL CAP PORTFOLIO DFA INVESTMENT DIMENSIONS GROUP INC | 78,288 | 1.2M $ | 0.01 % | 0.45 % | as of Jul 31, 2026 ↗ |
| Fidelity Extended Market Index Fund Fidelity Concord Street Trust | 56,910 | 1.2M $ | 0.00 % | 0.33 % | as of May 31, 2026 ↗ |
| Omni Small-Cap Value Fund Bridgeway Funds, Inc. | 49,200 | 1.1M $ | 0.09 % | 0.28 % | as of Jun 30, 2026 ↗ |
| Dimensional U.S. Small Cap ETF Dimensional ETF Trust | 46,598 | 714.8K $ | 0.00 % | 0.27 % | as of Jul 31, 2026 ↗ |
| U.S. MICRO CAP PORTFOLIO DFA INVESTMENT DIMENSIONS GROUP INC | 46,592 | 714.7K $ | 0.01 % | 0.27 % | as of Jul 31, 2026 ↗ |
| iShares Micro-Cap ETF iShares Trust | 39,242 | 905.7K $ | 0.06 % | 0.22 % | as of Jun 30, 2026 ↗ |
| Dimensional U.S. Core Equity 2 ETF Dimensional ETF Trust | 31,325 | 480.5K $ | 0.00 % | 0.18 % | as of Jul 31, 2026 ↗ |
| Schwab Small-Cap Index Fund SCHWAB CAPITAL TRUST | 28,468 | 436.7K $ | 0.01 % | 0.16 % | as of Jul 31, 2026 ↗ |
| Ultra-Small Company Market Fund Bridgeway Funds, Inc. | 24,600 | 567.8K $ | 0.38 % | 0.14 % | as of Jun 30, 2026 ↗ |
| Master Small Cap Index Series Quantitative Master Series LLC | 21,895 | 505.3K $ | 0.01 % | 0.13 % | as of Jun 30, 2026 ↗ |
| U.S. CORE EQUITY 2 PORTFOLIO DFA INVESTMENT DIMENSIONS GROUP INC | 21,237 | 325.8K $ | 0.00 % | 0.12 % | as of Jul 31, 2026 ↗ |
| Fidelity Total Market Index Fund Fidelity Concord Street Trust | 20,823 | 442.9K $ | 0.00 % | 0.12 % | as of May 31, 2026 ↗ |
| Avantis U.S. Small Cap Equity ETF American Century ETF Trust | 19,653 | 418K $ | 0.02 % | 0.11 % | as of May 31, 2026 ↗ |
| U.S. CORE EQUITY 1 PORTFOLIO DFA INVESTMENT DIMENSIONS GROUP INC | 18,946 | 290.6K $ | 0.00 % | 0.11 % | as of Jul 31, 2026 ↗ |
| Fidelity Series Total Market Index Fund Fidelity Concord Street Trust | 16,793 | 357.2K $ | 0.00 % | 0.10 % | as of May 31, 2026 ↗ |
| Adara Smaller Companies Fund RBB Fund, Inc. | 15,950 | 339.3K $ | 0.04 % | 0.09 % | as of May 31, 2026 ↗ |
| Nuveen Small Cap Blend Index Fund TIAA-CREF Funds | 15,525 | 238.2K $ | 0.01 % | 0.09 % | as of Jul 31, 2026 ↗ |
| Goldman Sachs Small Cap Growth Insights Fund Goldman Sachs Trust | 13,804 | 211.8K $ | 0.07 % | 0.08 % | as of Jul 31, 2026 ↗ |
| EQ/2000 Managed Volatility Portfolio EQ Advisors Trust | 12,683 | 292.7K $ | 0.01 % | 0.07 % | as of Jun 30, 2026 ↗ |
| Avantis U.S. Small Cap Value ETF American Century ETF Trust | 11,848 | 252K $ | 0.00 % | 0.07 % | as of May 31, 2026 ↗ |
| Virtus Small-Cap Fund Virtus Investment Trust | 11,481 | 265K $ | 0.20 % | 0.07 % | as of Jun 30, 2026 ↗ |
| Fidelity Small Cap Growth Index Fund Fidelity Salem Street Trust | 10,924 | 252.1K $ | 0.02 % | 0.06 % | as of Jun 30, 2026 ↗ |
| Fidelity Nasdaq Composite Index Fund Fidelity Concord Street Trust | 10,371 | 220.6K $ | 0.00 % | 0.06 % | as of May 31, 2026 ↗ |
| LVIP State Street Small-Cap Index Fund LINCOLN VARIABLE INSURANCE PRODUCTS TRUST | 8,700 | 200.8K $ | 0.01 % | 0.05 % | as of Jun 30, 2026 ↗ |
| Even Herd Long Short ETF Tidal Trust II | 8,472 | 195.5K $ | 0.32 % | 0.05 % | as of Jun 30, 2026 ↗ |
| U.S. VECTOR EQUITY PORTFOLIO DFA INVESTMENT DIMENSIONS GROUP INC | 7,816 | 119.9K $ | 0.00 % | 0.04 % | as of Jul 31, 2026 ↗ |
| VANGUARD BALANCED INDEX FUND VANGUARD VALLEY FORGE FUNDS | 7,075 | 163.3K $ | 0.00 % | 0.04 % | as of Jun 30, 2026 ↗ |
| Goldman Sachs Small Cap Equity Insights Fund Goldman Sachs Trust | 6,739 | 103.4K $ | 0.01 % | 0.04 % | as of Jul 31, 2026 ↗ |
| SIMT Small Cap Fund SEI INSTITUTIONAL MANAGED TRUST | 6,065 | 140K $ | 0.03 % | 0.03 % | as of Jun 30, 2026 ↗ |
| Small Cap Index Fund Northern Funds | 5,994 | 138.3K $ | 0.01 % | 0.03 % | as of Jun 30, 2026 ↗ |
| VANGUARD INSTITUTIONAL TOTAL STOCK MARKET INDEX FUND VANGUARD INSTITUTIONAL INDEX FUNDS | 5,730 | 132.2K $ | 0.00 % | 0.03 % | as of Jun 30, 2026 ↗ |
| Global X Russell 2000 ETF GLOBAL X FUNDS | 5,581 | 85.6K $ | 0.01 % | 0.03 % | as of Jul 31, 2026 ↗ |
| EQ/AB Small Cap Growth Portfolio EQ Advisors Trust | 5,000 | 115.4K $ | 0.01 % | 0.03 % | as of Jun 30, 2026 ↗ |
| EQ/Small Company Index Portfolio EQ Advisors Trust | 5,000 | 115.4K $ | 0.01 % | 0.03 % | as of Jun 30, 2026 ↗ |
| U.S. Small Cap Equity Fund RUSSELL INVESTMENT CO | 4,938 | 75.7K $ | 0.01 % | 0.03 % | as of Jul 31, 2026 ↗ |
| Dimensional US Sustainability Core 1 ETF Dimensional ETF Trust | 4,000 | 61.4K $ | 0.00 % | 0.02 % | as of Jul 31, 2026 ↗ |
| MetLife Russell 2000 Index Portfolio Brighthouse Funds Trust II | 3,995 | 92.2K $ | 0.01 % | 0.02 % | as of Jun 30, 2026 ↗ |
| Small-Cap Index Portfolio PACIFIC SELECT FUND | 3,417 | 78.9K $ | 0.01 % | 0.02 % | as of Jun 30, 2026 ↗ |
| Dimensional US Core Equity Market ETF Dimensional ETF Trust | 3,172 | 48.7K $ | 0.00 % | 0.02 % | as of Jul 31, 2026 ↗ |
| JNL/DFA U.S. Small Cap Fund JNL Series Trust | 3,100 | 71.5K $ | 0.01 % | 0.02 % | as of Jun 30, 2026 ↗ |
| AST Small-Cap Equity Portfolio Advanced Series Trust | 2,960 | 68.3K $ | 0.00 % | 0.02 % | as of Jun 30, 2026 ↗ |
| U.S. Sustainability Core 1 Portfolio DFA INVESTMENT DIMENSIONS GROUP INC | 2,892 | 44.4K $ | 0.00 % | 0.02 % | as of Jul 31, 2026 ↗ |
| SA U.S. Small Company Fund SA FUNDS INVESTMENT TRUST | 2,822 | 65.1K $ | 0.02 % | 0.02 % | as of Jun 30, 2026 ↗ |
| Vericimetry U.S. Small Cap Value Fund VERICIMETRY FUNDS | 2,665 | 61.5K $ | 0.03 % | 0.02 % | as of Jun 30, 2026 ↗ |
| 1290 VT Micro Cap Portfolio EQ Advisors Trust | 2,654 | 61.3K $ | 0.03 % | 0.02 % | as of Jun 30, 2026 ↗ |
| NVIT Small Cap Index Fund Nationwide Variable Insurance Trust | 2,648 | 61.1K $ | 0.01 % | 0.02 % | as of Jun 30, 2026 ↗ |
| ATM Small Cap Managed Volatility Portfolio EQ Advisors Trust | 2,622 | 60.5K $ | 0.01 % | 0.01 % | as of Jun 30, 2026 ↗ |
| Small Cap Index Trust John Hancock Variable Insurance Trust | 2,461 | 56.8K $ | 0.01 % | 0.01 % | as of Jun 30, 2026 ↗ |
| iShares Russell Small/Mid-Cap Index Fund BlackRock Funds | 2,109 | 32.4K $ | 0.00 % | 0.01 % | as of Jul 31, 2026 ↗ |
| Dimensional US Core Equity 1 ETF Dimensional ETF Trust | 2,010 | 30.8K $ | 0.00 % | 0.01 % | as of Jul 31, 2026 ↗ |
| GuideMark Small/Mid Cap Core Fund GPS Funds I | 1,869 | 43.1K $ | 0.04 % | 0.01 % | as of Jun 30, 2026 ↗ |
| DWS Small Cap Index VIP DEUTSCHE DWS INVESTMENTS VIT FUNDS | 1,843 | 42.5K $ | 0.01 % | 0.01 % | as of Jun 30, 2026 ↗ |
| T. Rowe Price Small-Cap Index Fund T. ROWE PRICE INDEX TRUST, INC. | 1,787 | 41.2K $ | 0.01 % | 0.01 % | as of Jun 30, 2026 ↗ |
| EQ/Morgan Stanley Small Cap Growth Portfolio EQ Advisors Trust | 1,780 | 41.1K $ | 0.01 % | 0.01 % | as of Jun 30, 2026 ↗ |
| BlackRock Small Cap Index V.I. Fund BlackRock Variable Series Funds, Inc. | 1,612 | 37.2K $ | 0.01 % | 0.01 % | as of Jun 30, 2026 ↗ |
| Blackstone Alternative Multi-Strategy Fund Blackstone Alternative Investment Funds | 1,600 | 36.9K $ | 0.00 % | 0.01 % | as of Jun 30, 2026 ↗ |
| Voya RussellTM Small Cap Index Portfolio Voya VARIABLE PORTFOLIOS INC | 1,417 | 32.7K $ | 0.01 % | 0.01 % | as of Jun 30, 2026 ↗ |
| Victory Extended Market Index Fund Victory Portfolios III | 1,376 | 21.1K $ | 0.00 % | 0.01 % | as of Jul 31, 2026 ↗ |
| SA Small Cap Index Portfolio SUNAMERICA SERIES TRUST | 1,372 | 21K $ | 0.01 % | 0.01 % | as of Jul 31, 2026 ↗ |
| LVIP Dimensional U.S. Core Equity 2 Fund LINCOLN VARIABLE INSURANCE PRODUCTS TRUST | 1,163 | 26.8K $ | 0.00 % | 0.01 % | as of Jun 30, 2026 ↗ |
| PD Small-Cap Growth Index Portfolio PACIFIC SELECT FUND | 1,083 | 25K $ | 0.02 % | 0.01 % | as of Jun 30, 2026 ↗ |
| CVT Russell 2000 Small Cap Index Portfolio Calvert Variable Trust, Inc. | 1,063 | 24.5K $ | 0.01 % | 0.01 % | as of Jun 30, 2026 ↗ |
| Nationwide Small Cap Index Fund Nationwide Mutual Funds | 1,043 | 16K $ | 0.01 % | 0.01 % | as of Jul 31, 2026 ↗ |
| Venerable Small Cap Index Fund Venerable Variable Insurance Trust | 936 | 21.6K $ | 0.01 % | 0.01 % | as of Jun 30, 2026 ↗ |
| JNL/DFA U.S. Core Equity Fund JNL Series Trust | 917 | 21.2K $ | 0.00 % | 0.01 % | as of Jun 30, 2026 ↗ |
| SmallCap Growth Fund I Principal Funds, Inc | 896 | 13.7K $ | 0.00 % | 0.01 % | as of Jul 31, 2026 ↗ |
| Voya VACS Index Series SC Portfolio Voya VARIABLE PORTFOLIOS INC | 859 | 19.8K $ | 0.01 % | 0.00 % | as of Jun 30, 2026 ↗ |
| Small Company Growth Portfolio Wilshire Mutual Funds Inc | 729 | 16.8K $ | 0.07 % | 0.00 % | as of Jun 30, 2026 ↗ |
| Small Cap Core Fund Northern Funds | 597 | 13.8K $ | 0.00 % | 0.00 % | as of Jun 30, 2026 ↗ |
| First Eagle Small Cap Equity ETF First Eagle ETF Trust | 569 | 8.7K $ | 0.46 % | 0.00 % | as of Jul 31, 2026 ↗ |
| Strategic Equity Allocation Trust John Hancock Variable Insurance Trust | 531 | 12.3K $ | 0.00 % | 0.00 % | as of Jun 30, 2026 ↗ |
| U.S. Social Core Equity 2 Portfolio DFA INVESTMENT DIMENSIONS GROUP INC | 531 | 8.1K $ | 0.00 % | 0.00 % | as of Jul 31, 2026 ↗ |
| EQ/Franklin Small Cap Value Managed Volatility Portfolio EQ Advisors Trust | 404 | 9.3K $ | 0.00 % | 0.00 % | as of Jun 30, 2026 ↗ |
| Penn Series Small Cap Index Fund Penn Series Funds Inc | 400 | 9.2K $ | 0.01 % | 0.00 % | as of Jun 30, 2026 ↗ |
| STATE STREET SMALL/MID CAP EQUITY INDEX PORTFOLIO STATE STREET INSTITUTIONAL INVESTMENT TRUST | 300 | 6.9K $ | 0.00 % | 0.00 % | as of Jun 30, 2026 ↗ |
| State Street Total Return V.I.S. Fund STATE STREET VARIABLE INSURANCE SERIES FUNDS INC | 296 | 6.8K $ | 0.00 % | 0.00 % | as of Jun 30, 2026 ↗ |
| ULTRA SMALL CAP PROFUND ProFunds | 151 | 2.3K $ | 0.00 % | 0.00 % | as of Jul 31, 2026 ↗ |
| Knights of Columbus U.S. ALL CAP INDEX FUND ADVISORS' INNER CIRCLE III | 64 | 981.8 $ | 0.00 % | 0.00 % | as of Jul 31, 2026 ↗ |
| Russell 2000 2x Strategy Fund Rydex Dynamic Funds | 63 | 1.5K $ | 0.00 % | 0.00 % | as of Jun 30, 2026 ↗ |
| PROFUND VP ULTRA SMALL CAP ProFunds | 48 | 1.1K $ | 0.01 % | 0.00 % | as of Jun 30, 2026 ↗ |
| PROFUND VP SMALL CAP ProFunds | 31 | 715.5 $ | 0.01 % | 0.00 % | as of Jun 30, 2026 ↗ |
| Russell 2000 Fund Rydex Series Funds | 29 | 669.3 $ | 0.00 % | 0.00 % | as of Jun 30, 2026 ↗ |
| Columbia Research Enhanced Small Cap ETF Columbia ETF Trust I | 23 | 530.8 $ | 0.01 % | 0.00 % | as of Jun 30, 2026 ↗ |
| Russell 2000 1.5x Strategy Fund Rydex Series Funds | 17 | 392.4 $ | 0.01 % | 0.00 % | as of Jun 30, 2026 ↗ |
| SMALL-CAP PROFUND ProFunds | 10 | 153.4 $ | 0.00 % | 0.00 % | as of Jul 31, 2026 ↗ |
| Dimensional US Vector Equity ETF Dimensional ETF Trust | 8 | 122.7 $ | 0.00 % | as of Jul 31, 2026 ↗ | |
| Russell 2000(R) 1.5x Strategy Fund Rydex Variable Trust | 3 | 69.2 $ | 0.00 % | 0.00 % | as of Jun 30, 2026 ↗ |
The funds most exposed to it
The weight is the share of a fund's net assets. The holders table ranks funds by number of shares. This one ranks them by the weight of the company in each fund.
| Fund | Weight in fund | |
|---|---|---|
| First Eagle Small Cap Equity ETF First Eagle ETF Trust | 0.46 % | as of Jul 31, 2026 ↗ |
| First Eagle Small Cap Opportunity Fund First Eagle Funds | 0.39 % | as of Jul 31, 2026 ↗ |
| Ultra-Small Company Market Fund Bridgeway Funds, Inc. | 0.38 % | as of Jun 30, 2026 ↗ |
| Even Herd Long Short ETF Tidal Trust II | 0.32 % | as of Jun 30, 2026 ↗ |
| Virtus Small-Cap Fund Virtus Investment Trust | 0.20 % | as of Jun 30, 2026 ↗ |
| Omni Small-Cap Value Fund Bridgeway Funds, Inc. | 0.09 % | as of Jun 30, 2026 ↗ |
| Small Company Growth Portfolio Wilshire Mutual Funds Inc | 0.07 % | as of Jun 30, 2026 ↗ |
| Goldman Sachs Small Cap Growth Insights Fund Goldman Sachs Trust | 0.07 % | as of Jul 31, 2026 ↗ |
| iShares Micro-Cap ETF iShares Trust | 0.06 % | as of Jun 30, 2026 ↗ |
| GuideMark Small/Mid Cap Core Fund GPS Funds I | 0.04 % | as of Jun 30, 2026 ↗ |
Quarter after quarter
Each row is one quarter of SEC filings, newest first. The change compares each quarter with the one before.
| Quarter | Shareholders | Change | Shares | Change |
|---|---|---|---|---|
| 2026Q3 | 94 | +51 | 2,712,141 | +24.3 % |
| 2026Q2 | 43 | 0 | 2,181,092 | -3.0 % |
| 2026Q1 | 43 | +1 | 2,249,661 | -10.0 % |
| 2025Q4 | 42 | +2 | 2,499,862 | -8.0 % |
| 2025Q3 | 40 | -7 | 2,715,856 | -12.7 % |
| 2025Q2 | 47 | +2 | 3,112,622 | -14.2 % |
| 2025Q1 | 45 | +2 | 3,629,235 | -5.2 % |
| 2024Q4 | 43 | +1 | 3,827,784 | +0.5 % |
| 2024Q3 | 42 | -4 | 3,806,899 | -0.0 % |
| 2024Q2 | 46 | -2 | 3,808,373 | +0.3 % |
| 2024Q1 | 48 | -5 | 3,795,347 | -2.3 % |
| 2023Q4 | 53 | 3,884,175 |
Institutional managers
76 managers declare this company to the SEC (Form 13F). The table shows the 25 largest.
| Manager | Shares | Value | |
|---|---|---|---|
| First Eagle Investment Management, LLC | 832,453 | 9.7M $ | as of Mar 31, 2026 |
| DIMENSIONAL FUND ADVISORS LP | 529,351 | 6.2M $ | as of Mar 31, 2026 |
| ACADIAN ASSET MANAGEMENT LLC | 466,837 | 5.4K $ | as of Mar 31, 2026 |
| MILLENNIUM MANAGEMENT LLC | 453,597 | 5.3M $ | as of Mar 31, 2026 |
| MARSHALL WACE, LLP | 417,076 | 4.9M $ | as of Mar 31, 2026 |
| Pacific Ridge Capital Partners, LLC | 405,371 | 4.7M $ | as of Mar 31, 2026 |
| ARROWSTREET CAPITAL, LIMITED PARTNERSHIP | 365,387 | 4.3M $ | as of Mar 31, 2026 |
| JANE STREET GROUP, LLC | 340,879 | 4M $ | as of Mar 31, 2026 |
| TWO SIGMA INVESTMENTS, LP | 266,856 | 3.1M $ | as of Mar 31, 2026 |
| Connor, Clark & Lunn Investment Management Ltd. | 174,159 | 2M $ | as of Mar 31, 2026 |
| Trexquant Investment LP | 173,889 | 2M $ | as of Mar 31, 2026 |
| BlackRock, Inc. | 145,446 | 1.7M $ | as of Mar 31, 2026 |
| SUSQUEHANNA INTERNATIONAL GROUP, LLP | 133,938 | 1.6M $ | as of Mar 31, 2026 |
| GEODE CAPITAL MANAGEMENT, LLC | 132,149 | 1.5M $ | as of Mar 31, 2026 |
| BRIDGEWAY CAPITAL MANAGEMENT, LLC | 109,118 | 1.3M $ | as of Mar 31, 2026 |
| RENAISSANCE TECHNOLOGIES LLC | 108,096 | 1.3M $ | as of Mar 31, 2026 |
| CITADEL ADVISORS LLC | 106,914 | 1.2M $ | as of Mar 31, 2026 |
| Palisades Investment Partners, LLC | 100,656 | 1.2M $ | as of Mar 31, 2026 |
| SEI INVESTMENTS CO | 92,515 | 1.1M $ | as of Mar 31, 2026 |
| Qube Research & Technologies Ltd | 88,517 | 1M $ | as of Mar 31, 2026 |
| XTX Topco Ltd | 74,606 | 871.4K $ | as of Mar 31, 2026 |
| Informed Momentum Co LLC | 74,305 | 867.9K $ | as of Mar 31, 2026 |
| UBS Group AG | 72,474 | 846.5K $ | as of Mar 31, 2026 |
| BNP PARIBAS FINANCIAL MARKETS | 63,541 | 742.2K $ | as of Mar 31, 2026 |
| MORGAN STANLEY | 59,092 | 690.2K $ | as of Mar 31, 2026 |
Declared shareholders of Amtech Systems Inc
There are 2 beneficial ownership filings. These stakes do not add up. An asset manager that files includes its own funds, which already appear among the funds on this page.
| Shareholder | Declared stake | Shares | |
|---|---|---|---|
| Orin Hirschman and 1 other | 7.20 % | 1,252,000 | as of Jun 30, 2026 · SCHEDULE 13G |
| First Eagle Investment Management, LLC | 4.90 % | 848,697 | as of Jun 30, 2026 · SCHEDULE 13G |
Cite this page
Titelia. "Fund shareholders of Amtech Systems Inc". https://titelia.com/en/stocks/amtech-systems-inc-US0323325045